Abstract
This paper proposes a wireless passive vibration sensor based on high‐temperature ceramics for vibration measurement in harsh environments such as automotive and advanced engines. The sensor can be equivalent to an acceleration‐sensitive RF LC resonance tank. The structural design of the LC tank and the signal wireless sensing mechanism are introduced in detail. The high‐temperature mechanical properties of the sensitive structure are analyzed using ANSYS at 25–400°C, which proves the usability of the vibration sensor in high‐temperature environment. The three‐dimensional integrated manufacturing of vibration sensors with a beam‐mass structure based on high‐temperature ceramics is completed by a bonding process. Finally, the performance of the sensor is tested on a built experimental platform, and the results show that the vibration sensitivity is approximately 1.303 mv/m·s-2, and the nonlinear error is approximately 4.3%. The vibration sensor can work normally within 250°C, and the sensitivity is 0.989 mv/m·s-2.
Highlights
In aviation, automobiles, and other fields, the monitoring of vibration parameters is critically essential to the normal operation of key components of certain large-scale facilities and equipment [1,2,3,4]
Based on the principle of mutual inductance coupling, an LC resonant sensor with acceleration sensitive structure is proposed in this paper
The measuring principle of the sensor is analyzed theoretically, and the mechanical properties of the sensitive structure are simulated under the field of acceleration and the coupling field of temperatureacceleration by ANSYS
Summary
Automobiles, and other fields, the monitoring of vibration parameters is critically essential to the normal operation of key components of certain large-scale facilities and equipment [1,2,3,4]. Various vibration sensors based on different sensitive principles such as piezoresistive, piezoelectric, and capacitive have been known and used for vibration measurement. Liu [19] in 2018 proposed an LTCC (Low Temperature Co-fired Ceramic) capacitive vibration sensor and measured ±1 g acceleration using the dividing head. It only aimed at the static measurement of acceleration, which is far from satisfying the real-time measurement of dynamic acceleration signal. The mechanical properties of the sensitive beam-mass structure in a hightemperature environment were simulated by ANSYS to verify the usability of the sensor. A vibration test platform was built to verify the performance of the fabricated sensor
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