Abstract
In this work, a wireless passive LC resonant sensor based on DuPont 951 ceramic is proposed and tested in a developed high-temperature/pressure complex environment. The test results show that the measured resonant frequency varies approximately linearly with the applied pressure; simultaneously, high temperature causes pressure signal drift and changes the response sensitivity. Through the theoretical analysis of the sensor structure model, it is found that the increase in the dielectric constant and the decrease in the Young’s modulus of DuPont 951 ceramic are the main causes that affect the pressure signal in high-temperature measurement. Through calculations, the Young’s modulus of DuPont 951 ceramic is found to decrease rapidly from 120 GPa to 65 GPa within 400 °C. Therefore, the LC resonant pressure sensor needs a temperature compensation structure to eliminate the impact of temperature on pressure measurement. Finally, a temperature compensation structure is proposed and fabricated, and the pressure response after temperature compensation illustrates that temperature drift is significantly reduced compared with that without the temperature compensation structure, which verifies the feasibility the proposed temperature compensation structure.
Highlights
Low-temperature co-fired ceramic (LTCC), developed by the Hughes company in 1982, is a new type of ceramic material
Because LTCC exhibits excellent merits for miniaturization, high integration, and compatibility, this technique has been widely used in fields such as high-frequency and microwave signals, especially combined with wireless passive sensing technology, making it widely used in high-temperature pressure measurement [4,5]
These results indicate that temperature compensation is needed for the LC resonant sensor, which can eliminate the influence of temperature on pressure measurement
Summary
Low-temperature co-fired ceramic (LTCC), developed by the Hughes company in 1982, is a new type of ceramic material. Since 2010, North University of China improved the sensor performance by introducing a scarified layer technology during lamination and by improving the structure without an air exhaust hole. It has realized pressure measurements under 600 °C [9]. From the in-depth theoretical analysis of the sensor structure model, it is found that high temperature causes an increase in the ceramic dielectric constant, and a decrease in the ceramic Young’s modulus These results indicate that temperature compensation is needed for the LC resonant sensor, which can eliminate the influence of temperature on pressure measurement
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