Abstract

We report of the design of a SAW delay line developed for a wireless pressure sensing system operating in the 434 MHz ISM-band. The structure is a one port configuration fabricated on quartz 37.5/spl deg/rotYX. It is hermetically sealed in all-quartz-package (APQ) technology with the SAW structure being placed on a diaphragm inside the cavity. The sensor allows for the measurement of absolute pressure values in the range from 0 to 8.5 bar. The SAW structure shows a linear phase although it incorporates chirped SAW components for enhancing the sensor sensitivity. The SAW structure is built up of two overlap-weighted dispersive split finger interdigital transducers (IDTs). An improvement of the sensor sensitivity by a factor of 32 compared to systems using non-dispersive SAW components has been achieved.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.