A Wideband Thermally Actuated SPDT RF MEMS Switch

Abstract

Here, a wideband thermally actuated with an automatic latching system single-port double-throw (SPDT) radio frequency-based microelectromechanical system (RF-MEMS) switch is presented. The switches employ two chevron type thermal actuators which they are connected to them. Four chevron actuators play the latching system role at the sidewalls of actuator chevrons of the switch. The proposed system designed by a standard fabrication method which is called Metal MUMPs trademark of MEMSCAP. Using the dielectric bridges (nitride) as the interface between the actuators and the switches, the RF circuitry is separated from DC actuators, allowing wideband operation. The switch represents an excellent wideband performance with an insertion loss of better than 0.5 dB up to 25 GHz. The return loss and isolation of the switch is better than 10 dB for the entire frequency band. An application of a proposed switch for a band selection network that is used in multiband transceivers and RF filters.