Abstract
Four gold surface barrier diodes for the measurement of backscattered electron (BSE) signals have been fitted to a Jeol JXA-50A electron microprobe. High quality images both at TV and slow scan rates have been obtained by using two pairs of diodes, one pair having low capacitance for TV imaging and a photovoltaic pair for slow scan imaging and for DC measurements. The problems encountered are discussed, methods of assessing detector performance are described and a comparison is made between diode and scintillator photomultiplier detectors in the scanning electron microscope (SEM) and microprobe.
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