Abstract
An elemental map by means of SPM is traditionally obtained by total counts entering an energy window (TCEW) corresponding to a characteristic X-ray of that element. Besides the characteristic X-ray signals of the element, the total counts contain the contribution of continuum background and overlapping peaks of the interfering elements as well. A method called NCEW (net counts entering an energy window) has been developed for off-line true elemental mapping. The continuum background is calculated with a trapezoid area determined by the counts within border gates and is subtracted from the total counts of the peak. The branch ratios of the characteristic X-rays of the interfering elements are used to correct their overlapping peaks. Because the net counts eliminate the contribution of the background and the overlapping peaks from the total counts, the map obtained by the NCEW is free of artifacts due to the continuum background and the peak overlapping. This method was tested by scanning a microbeam over a multi-foil target. Applications of the NCEW method to some environmental and geological samples are described.
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