Abstract
The development and preliminary evaluation of a very large pH-sensitive ISFET sensor array chip is reported in this paper. The sensor array chip boasts a 15×16 array of pH-ISFETs with on-chip control and readout circuits. It was designed and fabricated using a novel process which is compatible with standard CMOS technology. This process only required four new mask layers in the design stage and four extra standard processing steps in the fabrication stage. A novel signal processing technique was also employed.
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