A vertical inertial coarse approach for variable temperature scanned probe microscopy

Abstract

We have developed a variable temperature inertial coarse approach mechanism for use in scanned probe microscopy. This reliable micropositioner has a coarse range of 2.5 mm and can take individual steps of less than 10 nm from 4 to 300 K. This simple, compact device is both nonmagnetic and glueless. It is operational in both horizontal and vertical geometries and is driven by a low voltage sawtooth waveform. We report on the design and performance of the device.