Abstract
This study produces cupric oxide (CuO) nanowires (NWs) using RF sputtering, and integrated CuO NWs in a micro electron mechanical systems (MEMS) structure to form a CuO-NWS/MEMS gas sensor. The XRD pattern shows a preferred (002) orientation of the CuO NWs. The CuO-NWS grows vertically on the MEMS structure and a competitive growth model is illustrated. It is found that the CuO-NWs/MEMS gas sensor has a higher selectivity to NO2 compared with CO, CO2, NH3 and SO2. In long term measurement, the average sensor response is about 50.1% with an inaccuracy of 3% at the temperature of 119 ℃ and the NO2 concentration of 500 ppb. These results show that the CuO-NWs/MEMS sensor with sputtering method is stable and reproducible in NO2 gas sensing.
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