A versatile time-of-flight medium-energy ion scattering setup using multiple delay-line detectors

Abstract

We present the most recent upgrades of the time-of-flight medium energy ion scattering (TOF-MEIS) system in Uppsala. The experimental chamber features a 6-axis goniometer with a sample annealing stage and two delay line detectors for composition analysis with high depth resolution and depth-resolved crystallography. The first detector has a large solid angle and can be moved circularly around the target position which allows to detect backscattered or transmitted ions. The second detector features increased flight distance from sample to detector resulting in enhanced energy resolution. A reduction from 1.4 keV to 0.4 keV is achieved for 100 keV He scattered from an Au surface for 1 ns time resolution, equivalent to a depth resolution of 6 Å. This detector is equipped with an electrostatic electrode in order to deflect charged particles, which allows to study the charge state for scattered ions in the medium energy regime.