Abstract
A single ridged waveguide with nonconstant ridge height, operated with a traveling wave has been proven to be a versatile microwave plasma applicator. Easy dimensioning, inexpensive production, and compatibility to standard rectangular waveguide components are the main advantages compared to other designs. The described plasma source is especially suitable for any applications where an exceptionally uniform plasma is required. Design equations are given for easy adaption of the applicator to individual requirements. The applicator has been investigated for microwave excitation of a diffusion-cooled CO2 laser. With a nonoptimized system, laser output power of 9 W could be achieved in a quasi-cw mode. A traveling discharge operating mode is described which is useful for plasma diagnostics and for pulsed laser applications.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
