Abstract
Abstract The topic of this work is the sequential use of Solid Immersion Lenses (SILs), created in bulk silicon in less than 20 minutes of processing time, using a focused ion beam and a bitmap milling process. Fibbed SILs can be removed by polishing, and the silicon back surface resumes a perfect planar shape for further backside analysis or the creation of more SILs. The influence of the progressively thinner sample thickness on the magnification of the SIL was analyzed. As fibbed SILs in this work are about 1.4 µm thick and have an additional magnification of 2.4, a second process after removal has been found to decrease magnification not more than 20%. The presence of interference rings in the SIL image could be almost completely removed by anti-reflective coating. Photon emission microscopy, performed using fibbed SILs, allowed to clearly distinguish between sources that were separated by 240 nm wide structures.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
