Abstract

A novel type of vector network analyzer integrated with two coplanar-waveguide (CPW) probe tips for making on-wafer measurements is presented. The CPW configuration is capable of large bandwidths and allows measurements to be made directly at the device under test. The analyzer consists of detector diodes spaced logarithmically along two CPW probe tips to sample the signal and uses six-port theory to calculate s-parameters. A 5-10-GHz proof-of-concept model was built and used to test a MMIC PIN diode switch. >

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