Abstract
A global model (GM) assumes ion energy ( ε ) on the electrode equals the time-averaged sheath voltage ( Vshtt ). However, using particle-in-cell simulation, we found that ε differs from Vshtt. We propose a unified global model (UGM) that calculates ε and collisional energy losses of ions by employing plasma circuit and sheath models, accompanied by a voltage and current sensor. We compared the results of the UGM with the experimental measurements and the results revealed that UGM is closer to the experiment than GM. UGM shows a linear relationship with the experiment, indicating that the UGM is applicable for plasma monitoring.
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