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Abstract
A resonantly driven piezoelectric pump system with outstanding characteristics is developed in this paper. The system consists of two diaphragm displacement pumps and a U-shaped resonator. The diaphragm pump is comprised of a pump chamber, two arrays of polydimethylsiloxane check valves and two compressible spaces near the inlet and outlet. The U-shaped resonator is designed to obtain uniform strain distribution under the out-of-phase vibration mode. This system utilizes a symmetric structure and flexible link fixture to enhance the overall performance with prominent features such as good reliability, low energy loss, high working efficiency, automatic adjustment of working conditions and ease of holding. Dynamic characteristics of the resonator are investigated. A prototype pump system with the outline dimensions of 30 mm × 37 mm × 72.5 mm is fabricated and tested. Experimental results show that the system can pump tap water at a flow rate of over 1660 ml min−1 under zero backpressure or at a backpressure of approximately 85 kPa under zero flow rate, when driven by sinusoidal voltages of 300 Vpp and resonant frequencies of 312 and 345 Hz.
Published Version
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