Abstract
The paper proposes a type of symmetrical flexure hinge displacement amplification mechanism, which is based on the differential lever to effectively improve the displacement output stroke of the PZT and reduce the additional displacement. In addition to describes the working principle of the differential displacement amplification, it establishes the semi-model of the micro-displacement amplification mechanism according to the symmetrical structure. The stiffness, displacement loss, and natural frequency of the amplification mechanism are simulated by finite element analysis (FEA). Simultaneously, build the mathematical model of amplification ratio to obtain the optimal driving frequency when the natural frequency is 930.58 Hz. The maximum output displacement of the designed mechanism is 313.05 µm and the amplification ratio is 6.50. Due to the symmetrical structure, the output additional displacement of the whole amplification mechanism is small.It provides a scientific basis for further improving the positioning accuracy of the micro/nano drive control system.
Highlights
Because of its high precision and resolution characteristics, the micro-positioning platform is widely used in a microbial operation, micro/nanoprocessing, MEMS assembly, optical fiber calibration [1,2,3,4]
Using ANSYS, the mechanism is analyzed with finite elements, and the maximum output displacement is achieved by experimental verification
To effectively improve the displacement output stroke of Piezoelectric actuators (PZT) and reduce the additional displacement, the paper proposes a type of symmetrical flexure hinge displacement amplification mechanism based on the differential lever
Summary
Because of its high precision and resolution characteristics, the micro-positioning platform is widely used in a microbial operation, micro/nanoprocessing, MEMS assembly, optical fiber calibration [1,2,3,4]. Due to space limitation, that is often unable to achieve a larger motion magnification, so the multistage lever amplification mechanism is often used It is a special multistage lever mechanism, which can obtain a larger displacement output ratio under a relatively small structure, and makes up for the defect of the small amplification. Tang et al [10] designed a kind of amplification mechanism based on the principle of triangle and lever, deduced the displacement amplification ratio formula of the mechanism. Choi et al [13] proposed an experimental verification method for the design of a high-precision amplification mechanism: a flexure hinge and a piezoelectric actuator. Based on the principle of differential lever amplification, the semi-model of the mechanism is taken for analysis, the amplification ratio and displacement loss are obtained. Using ANSYS, the mechanism is analyzed with finite elements, and the maximum output displacement is achieved by experimental verification
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