A Two-Axis MEMS Scanner Driven by Radial Vertical Combdrive Actuators

Sheng-Jie Chiou,Ming C Wu,Chia-Wei Sun,Jui-Che Tsai,Tien-Liang Hsieh,Dooyoung Hah

doi:10.1109/omems.2007.4373851

A Two-Axis MEMS Scanner Driven by Radial Vertical Combdrive Actuators

Sheng-Jie Chiou, Ming C Wu + Show 4 more

https://doi.org/10.1109/omems.2007.4373851

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Publication Date: Aug 1, 2007

Citations: 7

Affiliation: National Taiwan University, Industrial Technology Research Institute, Louisiana State University

#Rotational Degrees Of Freedom #Vertical Actuators + Show 8 more

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Abstract

We report a two-axis MEMS scanner driven by radial vertical combdrive actuators. The device is fabricated by a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is designed to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical comdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Mechanical rotation angles of plusmn5.4deg at 42 V and plusmn2.4deg at 63 V are obtained for rotation about the lower and upper springs, respectively.

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