Abstract
Thermal crosstalk between array structures is a key factor in limiting the sensitivity of micro-nano array sensors. We propose a two-stage thermally isolated structure with thermal holes and heat dissipation layer and pulsed voltage heating to reduce thermal crosstalk. Through finite element thermal simulation analysis as well as thermal interference test, the results show that the thermal crosstalk of the two-stage structure is reduced by 12.89% and 39.67%, respectively, in the steady state compared to the structure with no thermal isolation, and pulsed voltage heating leads to the thermal crosstalk of the two-stage structure to be <10%.
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