Abstract

This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating structure composed of one magnet and two coils. The mirror-actuating device generates decoupled scanning motions about two orthogonal axes by combining two electromagnetic actuators of the conventional moving-coil and the moving-magnet types. We implement a finite element analysis to calculate magnetic flux in the electromagnetic system and experiments using a prototype with the overall size of 22 mm (W) × 20 mm (D) × 15 mm (H) for the mirror size of 8 mm × 8 mm. The upper moving-coil type actuator to rotate only the mirror part has the optical reflection angle of 15.7° at 10 Hz, 90°at the resonance frequency of 60 Hz at ±3V(±70mA) and the bandwidth of 91 Hz. The lowermoving-magnet type actuator has the optical reflection angle of 16.20°at 10 Hz and50°at the resonance frequency of 60 Hz at ±5V(±34mA) and the bandwidth of 88 Hz. The proposed compact and simple 2-D scanning mirror has advantages of large 2-D angular deflections, wide frequency bandwidth and low manufacturing cost.

Highlights

  • This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating structure composed of one magnet and two coils

  • Electrostatic actuation is widely used for mechanical systems (MEMS) based optical devices [1,2,3,4], but the main drawback is relatively high voltages over 40 V required for the large angular motion of the scanning mirror

  • Some electromagnetic actuators have been introduced in the 2-D scanning mirror systems with large angular deflections and high dynamic performances [19,20]

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Summary

Introduction

This work proposes a two-dimensional (2-D) laser scanning mirror with a novel actuating structure composed of one magnet and two coils. Electrostatic actuation is widely used for MEMS based optical devices [1,2,3,4], but the main drawback is relatively high voltages over 40 V required for the large angular motion of the scanning mirror. The MEMS based, electromagnetically actuated 2-D scanning mirrors with moving-coil types [12,13] or with steel materials [14] have large reflection angles at the resonance frequency. Some electromagnetic actuators have been introduced in the 2-D scanning mirror systems with large angular deflections and high dynamic performances [19,20] Their complex structures and bulky sizes become drawbacks for the 2-D actuation in many applications such as confocal laser scanning microscopes, optical coherence topographies, and scanning laser rangefinders, projectors and laser marking machines

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