Abstract
A reliable high temperature substrate heater for thin film deposition was constructed. The heater has a modular design and is built from parts that are easy to fabricate. The heater consists of a square arrangement of four tungsten filaments in a disk-shaped molybdenum susceptor. The electrical connections are placed near the edge where they are easily accessed. A finite element analysis shows that this design produces a more uniform temperature distribution than typical radial arrangements of filaments. The excellent performance of the new heater is demonstrated by thickness variations of less than 2% in thin films of lithium tantalate films grown on a 3.75 cm diam substrate by a high vacuum metal-organic chemical vapor deposition process.
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