Abstract
A reliable high temperature substrate heater for thin film deposition was constructed. The heater has a modular design and is built from parts that are easy to fabricate. The heater consists of a square arrangement of four tungsten filaments in a disk-shaped molybdenum susceptor. The electrical connections are placed near the edge where they are easily accessed. A finite element analysis shows that this design produces a more uniform temperature distribution than typical radial arrangements of filaments. The excellent performance of the new heater is demonstrated by thickness variations of less than 2% in thin films of lithium tantalate films grown on a 3.75 cm diam substrate by a high vacuum metal-organic chemical vapor deposition process.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
