A tunable microlens scanner with large-vertical-displacement actuation

Ankur Jain Ankur Jain,Huikai Xie Huikai Xie

doi:10.1109/memsys.2005.1453875

A tunable microlens scanner with large-vertical-displacement actuation

Ankur Jain Ankur Jain, Huikai Xie Huikai Xie

https://doi.org/10.1109/memsys.2005.1453875

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Publication Date: Jul 5, 2005

Citations: 8

Affiliation: University of Florida

#Lens Holder #Large-vertical-displacement + Show 8 more

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Abstract

We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 /spl mu/m diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 /spl mu/m is achieved with a 700 /spl mu/m-by-320 /spl mu/m LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 /spl mu/m, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

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