Abstract
Abstract We present a new post-fabrication frequency-tuning method for laterally driven electrostatic microresonators using the DC-biased electrostatic tuning-comb structures arranged in a triangular shape. The tuning-comb structures adjust the resonant frequency of the microresonator using the linear electrostatic force, generated by the tuning-combs of linearly varied finger-length. The electrostatic tuning force and the associated frequency change, caused by the DC-biased triangular tuning-comb array, have been derived in terms of the tuning voltage A set of frequency-tunable microresonators has been designed and fabricated by the four-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured at the reduced pressure of 1 torr in order to eliminate the air damping effect. The resonant frequency reduction of 80Hz is obtained for a tuning voltage increase of 20V. Possible source of the discrepancy between the theoretical estimates and experimental results has been discussed.
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