Abstract
When automatic Working processes, such as parts asembling, deburring and grinding, are made by robots, force control must be adapted for their precise work. In such a case, a 6-axis force sensor is indispensable, and it must have the following three characteristics : (i) Compact size and light weight, (ii) High rigidity, (iii) High accuracy and resolution. In order to satisfy these requirements, parallel plates structures and radial plates structures are adapted in newly designed 6-axis force sensors. After the investigations, it became clear that they satisfy the above requirements. For example, in case of a B-type detecting block where the rated force is 100 N, rated moment is 10 N -m, it is small (50 mm outer diameter, 44 mm height), light (116 g weight) and rigid (over 1.5 kHZ natural frequency) enough. Its final error is smaller than 3% F. S.. Its performances are confirmed in several kinds of actual works.
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