Abstract
In this work, a co-planar waveguide (CPW) microwave transmission line on high-resistivity silicon is employed as a microwave heater at 25 GHz to heat a sub-microliter volume of 0.23 μL. The CPW heater and fluidic layout are co-designed using COMSOL Multiphysics to achieve rapid, contact-less and uniform heating. The manufactured device is bond-wired and experimentally tested using the simultaneous microwave excitation and optical investigation. Heating performance is evaluated using a fluorescent mixture of Rhodamine B and deionised water loaded in the fluidic channel. A heating rate of 12°C/s is achieved with 1.58 W of power at 25 GHz and the heating uniformity of ±2°C is maintained during 10 seconds of heating.
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