A torsional MEMS varactor with wide dynamic range and low actuation voltage

Abstract

A MEMS varactor using torsional beams for actuation is proposed. Analytical expression for electrostatic torque developed is derived. The structure is compared with existing structures for dynamic range and actuation voltage. It is demonstrated that the proposed varactor outperforms the other structures in terms of wide dynamic range and lower actuation voltage, coupled with ease of fabrication. A methodology to choose the dimensions of varactor beams and plates has been outlined.