Abstract
A fully CMOS integrated carbon nanotube (CNT) sensor array platform that consists of an 8×8 array of unitary CNT elements has been designed and fabricated. For digital conversion of the analog voltage of CNT sensor elements, a correlated double sampling (CDS) type Successive Approximation Register (SAR) Analog/Digital converter has been used. The chip has been applied to sense the DNA hybridization event in the transient state, even though the chip can be applied to general molecular detection. It is shown that the fabricated fully CMOS integrated CNT sensor array platform can measure the time change of the resistance value of the sensor array cell in micro second interval by changing the clock frequency. The CMOS sensor chip presented in this research can be used various sensor applications by proper functionalization of CNT networks.
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