Abstract
This paper presents a millimeter-wave frequency-shift-based CMOS biosensor that is capable of providing three-dimensional (3D) resolution. The vertical resolution from the sensor surface is obtained using dual-layer LC oscillators, which enable 3D target detection. The LC oscillators produce different frequency shifts from the desired resonant frequency due to the frequency-dependent complex relative permittivity of the biomolecular target. The measurement results from a 65-nm test chip demonstrated the feasibility of achieving 3D resolution.
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