Abstract
A circular micro-electrode array with three phases is designed and prototyped using PolyMUMPs process for AC electro-osmotic flow pumping. Finite element model of the micro electrode array has been developed using COMSOL Multiphysics™. Performance of the electrode array is simulated and a double peak velocity phenomenon is found for this design, which is confirmed by experimental testing. Using ethanol as testing medium, the two time-averaged peak flow velocities are approximate 320 μm/s at 7 Hz and 850 μm/s at 100 Hz. It is found that the simulated and experimental results agree well.
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