Abstract
A capacitive type relative humidity sensor utilizing newly developed cross-linked fluorinated polyimide has been fabricated using thin film technology and evaluated for commercial building and factory applications. The sensor showed a good initial performance with less than 1% r.h. hysteresis and a 0 ± 0.1% r.h./°C temperature coefficient of capacitance along with good stability especially under high temperature and high humidity conditions. Also, because of the inherent chemical resistance of the polyimide, good sensor stability when subjected to volatile environments has been demonstrated.
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