Abstract
Abstract A hot film type thermal mass flow meter for gases is presented. It directly measures the mass flow rate, which is a quantity of interest in chemical processes and does not need any correction for changes in temperature and pressure. The heart of the measuring system is the sensor, which encloses platinum thin film resistors and a field-sited transmitter. Due to a novel digital signal forming circuit the sensors are interchangeable. They have a two-wire connection to the control section, where a microprocessor-based analysing unit performs a fast linearisation of the nonlinear signal of the sensor. Standard analog output signals as well as standard computer interfaces allow connections to process control systems. Excellent long-term stability in adverse enviroment, low pressure drop, simple handling, high accuracy (error
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