Abstract
A theoretical model is developed to explain properties of the electron-cyclotron-resonance (ECR) plasma and an experiment is conducted to compare the theoretical predictions with experimental measurements. A theoretical expression of the electron temperature Te is obtained assuming that the plasma electrons are heated by the transverse electric field of the input microwave. The electron temperature is expressed as Te=a+bp−1/2, where p is the plasma-chamber pressure, and the coefficients a and b should be determined from system parameters. Making use of the ambipolar diffusion, the plasma potential φ is described in terms of the local plasma density np. That is eφ(r,z)=Te ln[np(r,z)/nw], where −e is the electron charge and nw is the plasma density at the surface of the chamber. For the case of low neutral density, the plasma density np is also expressed as np2=γ2p exp(−εi/Te)−γ∥, where εi is the ionization energy of neutrals by electrons and the constants γ2 and γ∥ should be determined from system parameters. These theoretical predictions agree reasonably well with experimental data.
Published Version
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