Abstract
The deformation of large glass substrate in air-flotation system affects detection accuracy of inspection instrument. According to the gas lubrication theory, Timoshenko’s thin film theory and the simulation figure of the pressure distribution of the air film flow field, the air load distribution model of the air film is established, and the deformation expression of the large liquid crystal glass substrate in air-flotation system is given. On this basis, a theoretical design method for designing nozzle pitch of orifice throttling air-flotation system was proposed. Combined with examples, the results of theories and simulation are compared. An experiment on the deformation of the glass substrate was carried out on an experimental prototype. The difference between the experimental results and the theoretical results does not exceed 10%.
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