A theoretical and experimental investigation into tool setting induced form error in diamond turning of micro-lens array

Abstract

Micro-lens array (MLA) has been widely used for 3D imaging, etc., due to its excellent functional performances. Ultra-precision diamond turning (UPDT) offers a satisfying solution to the high-quality fabrication of MLA with sub-micrometric form accuracy and nanometric surface roughness. However, in UPDT tool setting, errors would deteriorate form accuracy as a crucial factor. This study focuses on discussing the tool setting effect on form error of MLA and proposes a new two-step tool setting method for UPDT. Firstly, a theoretical model was established for form error of MLA under tool setting errors. Moreover, a new two-step tool setting method was developed with high accuracy to control the tool setting errors. Finally, a series of experiments were carried out with different tool setting errors for the MLA fabrication, and its form error would be measured. The theoretical and experimental results are found that the proposed tool setting method is effective with a high-precision accuracy and the tool setting errors would crucially induce periodical form error at the MLA of UPDT. Significantly, the study draws up a comprehensive understanding of the tool setting effect on form accuracy of MLA in UPDT with the further improvement.