Abstract
A terahertz ellipsometer, based on the Novosibirsk free electron laser (FEL), is described. The device operates using the dynamic photometric “polarizer-sample-analyzer” scheme with a rotating analyzer. Sources of systematic errors, attributed to imperfections of optical elements, the accuracy of their alignment, and the influence of random errors, which are caused by measuring-section noises, were analyzed. The whole device and its separate units were tested. From results of measurements on tested samples, the operation accuracy of the ellipsometer was determined: δΨ ⩽ 0.3° and δ(cosΔ) ⩽ 0.01. The measurement data obtained at a wavelength of 147 μm on the thickness and reflective index of blood films, which were deposited on a silicon substrate, are presented. In this case, the measurement accuracy of the reflective index is ±0.05 and thickness is 0.2 μm.
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