Abstract

A technique for operating buried channel CCD imagers to achieve very low dark current with no loss in optical sensitivity is described. Using this technique on a 4-phase CCD shift register operated in an imaging mode, the dark current is reduced from 7.0 nA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> to 0.60 nA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> at 295°K.

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