Abstract
In this paper, we introduce a multi-probe Scanning Probe Microscopy (SPM) tool in the context of system of systems (SoS) concepts. The tool exhibits strong characteristics of SoS such as interoperability, integration and independency of each individual system. Each probe terminal constitutes an independent scanning system that can operate individually. The interoperability of the systems through signal exchange bring strong advantages and help users in order to design innovative applications that would not be easily achievable when a single system is used. As an independent system, each probe terminal includes its own controller and feedback mechanism for precise operation which is controlled by individual software running on control PCs. After introducing the overall system, we briefly mention one of the innovative real-world applications that we have been currently working on in an effort to show the strength of SoS engineering and filling the gap between theory and practice.
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