Abstract
This paper presents a shear-mode piezoelectric microactuator that can be easily integrated with a suspension for dual stage actuation used in hard disk drives. The finite element method was employed to investigate the static and dynamic performance of the assembly using a simple cantilever suspension integrated with the microactuator. Experiments were also conducted to verify the numerical analysis results. A modern suspension integrated with the microactuator was then simulated based on the optimised structure of the actuator/suspension assembly, and the results showed that 1.17-μm tip stroke could be obtained while the driving voltage was only 20 V.
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