A Survey of Error Analysis and Calibration Methods for MEMS Triaxial Accelerometers

Bo Xiao,Mingxu Sun,Xiaodong Liu,Qi Liu,Yinghang Jiang

doi:10.32604/cmc.2020.06092

Abstract

MEMS accelerometers are widely used in various fields due to their small size and low cost, and have good application prospects. However, the low accuracy limits its range of applications. To ensure data accuracy and safety we need to calibrate MEMS accelerometers. Many authors have improved accelerometer accuracy by calculating calibration parameters, and a large number of published calibration methods have been confusing. In this context, this paper introduces these techniques and methods, analyzes and summarizes the main error models and calibration procedures, and provides useful suggestions. Finally, the content of the accelerometer calibration method needs to be overcome.

Highlights

MEMS-based (Microelectromechanical systems) sensors have the advantages of smaller size, lower cost, lower power consumption, etc., and are widely used in various fields such as smart mobile devices, computers, smart home management, robots, automobiles, and medical fields, depicting good application prospects [Liu, Chen, Zhou et al (2007); Liu and Liu (2018)]
This model is not fully applicable to MEMS accelerometers, so we need to consider the sensitivity of the cross-axis when building the model
MEMS accelerometer will be affected by many factors, and sometimes it will have obvious nonlinear characteristics

Summary

Introduction

MEMS-based (Microelectromechanical systems) sensors have the advantages of smaller size, lower cost, lower power consumption, etc., and are widely used in various fields such as smart mobile devices, computers, smart home management, robots, automobiles, and medical fields, depicting good application prospects [Liu, Chen, Zhou et al (2007); Liu and Liu (2018)]. In order to ensure the accuracy of the sensor data and improve the use of the accelerometer, we need to calibrate the accelerometer. The first method achieves the calibration goal mainly by rotating on the turntable, centrifuge and other equipment or putting them in multiple positions. This method is economically expensive and difficult to implement. It is necessary to explore an error calibration and compensation method of an acceleration sensor that is simple and easy to implement. The paper is organized as follows: Section II describes the acceleration calibration model, include the error analysis of the MEMS accelerometer and the parameter calibration model.

Accelerometer calibration model

MEMS accelerometer error analysis

Parameter calibration model

Error calibration method for MEMS accelerometer

Summary