Abstract
A composite target is developed for magnetron sputtering of alloys using silver and palladium with different area ratios. A process is proposed for modification of both surfaces of palladium-silver films formed by PVD and electroplating to improve hydrogen permeability of the amorphous palladium layer electrodeposited from a water solution of its salt at the current density exceeding the diffusion current density for these conditions. The modified palladium-silver membrane becomes hydrogen-permeable at room temperature at the overpressure values up to 0.3 MPa.
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