Abstract
Electrostatically driven moving micromirrors are proposed in this work for the fabrication of a tuneable Fabry–Perot interferometer. The device is intended for a gas sensing application, and operates in the medium infrared spectral range. In order to achieve high filter selectivity and to reduce the loss of transmitted light it is of utmost importance that the mirrors are kept parallel after release and during device actuation. Surface micromachined polysilicon mirrors have been selected for this application. This technology provides an accurate control of the air gap between mirrors. The internal homogeneous stress and stress gradient states of the polysilicon films have a great influence on mirror deflection upon release. The micromachining process developed to obtain flat-surface micromirrors with an accurate air gap, by reducing the stress-induced polysilicon deflection and building thick oxide sacrificial layers is described in this work.
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