Abstract
Printed electronics techniques show promise as high-throughput, low-cost methods for fabricating micro-scale device features. In this work, we demonstrate a SAW resonator fabricated through a printing process. Silver nanoparticle ink is introduced to a vapor-permeable template that is patterned with the desired SAW resonator metallization. After the solvent in the ink evaporates, the nanoparticles within the patterned template tightly pack to form the device metallization. Interdigitated resonator electrodes with widths and spacing ranging from 500nm to 1μm were patterned on lithium niobate, corresponding to center frequencies of 2.1–2.4GHz. The maximum quality factor was 13. Limitations and potential process improvements are discussed to improve resonator quality factor in future work.
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