Abstract

Differential Pressure (DP) gradient are important indicators for measuring the cleanliness of a cleanroom. In the traditional dust-free room, the control requirements of supply air volume (G<sub>s</sub>) and DP balance are usually achieved by adjusting the fan frequency and the angle of the air conditioning purifier system, which wastes remarkable amounts of time and cannot achieve accurate regulation. Therefore, based on the analysis of the cleanroom model, a G<sub>s</sub> balance adjusting strategy and a DP adjustment algorithm were proposed. The adjustment strategy was found to achieve G<sub>s</sub> balance in a multi-room area. Based on constant G<sub>s</sub>, a theoretical analysis of DP air volume, and adjustments of the distribution of return air volume and exhaust air volume, the DP adjustment algorithm realized the stability of the DP gradient in the multi-room area. In the experimental verification of the model, the relevant errors of the total G<sub>s</sub>, total fresh air volume, and total exhaust air volume were within [–143, 265] m<sup>3</sup> /h. Compared with the room G<sub>s</sub> calculated by the algorithm, the G<sub>s</sub> error was maintained within [–1.8%, 5.3%], and compared with the room DP calculated by the algorithm, the DP error was maintained within [–1.9, 1.3] Pa.

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