Abstract
We presented a 3D stacking thin-film temperature sensor with a total width down to 140 nm, a temperature resolution of 40–100 mK, and repeatable sensitivities of 9.6 ± 0.7 μV K−1 and 3.6 ± 0.1 μV K−1 for Cr/Pd and Au/Pd sensors with varied junction size.
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