Abstract
This paper will focus on the energy performance evaluation of a cooling plant system in a semiconductor factory. Several energy saving technologies namely: integrated cooling towers, free cooling systems, control of the chilled water quantity, etc., have been adopted to improve efficiency of the cooling plant system. We have collected actual operating data for 2 years and evaluated the performance of chillers’ COP and the whole cooling plant system's COP and they showed satisfactory results even if the thermal load of the factory was about half compared with design phase assumption. We also have verified each effect of the energy saving technologies through model-based simulation analysis. The annual electric power consumption dropped about 35% compared to conventional cooling plant systems in case of design phase thermal load. And the faulty status operation of the chiller's number control miss occurred while we monitored. Electric power consumption increased about 17% compared to normal status operation at the same period.
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