Abstract
Polycrystalline BaTiO3 thin films have been prepared on slid grass substrate by RF/DC magnetron sputtering equipment. The films were deposited at evoporator system and were annealed at heattreatment. The films had a dense microstruture with fine grains. The electrical properties of the films were dramatically controlled with annealing. Samples Preparation were analyzed in term of PTCR(positive temperature coefficient of Resistivity) Samples were made in the substrate tempera-true of 400°C deposition time of 10 hours,and forward power of 210watt. R-T(resistivity-tempera-true) Characteristics of the samples were investigated as a function of the substrate type and the ambient temperature. The resistivity of the thin film specimens was compared with that of the bulk type specimens. By using RF/DC magnetron sputtering system, we obtained lower resistivity in the thermistor with thin BaTiO3 film than that in the bulk type thermistor.
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