A Study on the Deformation Behavior of a Microstructure Depending on Its Shape and the Cutting Section in the Precision Cutting of a Functional Part

Yong-Shin Lee,Young-Jae Choi,Ki-Hyeong Song

doi:10.3390/app9142940

Yong-Shin Lee, Young-Jae Choi + Show 1 more

Open Access

https://doi.org/10.3390/app9142940

Copy DOI

Abstract

The shape accuracy of microstructures is an important factor that directly affects the quality and performance of products. Nevertheless, it is difficult to find a study for the shape accuracy of microstructures below several microns. This study aimed to reduce the shape error in the precision machining of microstructures with a repeated triangular cross-sectional shape with a width of 5 µm or less. Two important factors in this study were the morphological features of the microstructure to be fabricated and the cross-sectional shape of the chip. The tool path was modified in consideration of these two factors. Before the tool path change, the shape error due to the deformation of the triangular micropattern in a DOC (depth of a cut) of 1 µm was about 0.39 µm. However, after the tool path was modified, the shape error due to deformation did not occur while maintaining the DOC at 1 µm.

Highlights

Biochips, and fuel cells, which are used as core components in various high-tech industries, are fabricated in a form that consists of a microstructure on the surface [1,2,3,4,5,6]
More complicated cross-sectional shapes can be realized when the precision turning process is combined with additional devices such as a fast tool servo (FTS) and a slow tool servo (STS) [13,14,16,17]
The factors affecting the shape cutting this paper focuses on the two velocity factors above in terms of looking for this the accuracydepth

Summary

Introduction

Biochips, and fuel cells, which are used as core components in various high-tech industries, are fabricated in a form that consists of a microstructure on the surface [1,2,3,4,5,6]. Microstructures designed on the surface of the lens constitute one of the key methods to achieve high optical performance. Many studies have been conducted on ultra-precision machining technology to fabricate the aspherical surface or the freeform surface of a lens with a repeated fine structure [7,8]. Precision turning can produce microstructures with a simple cross-section with a single repeated shape such as triangles or rectangles at higher speeds. More complicated cross-sectional shapes can be realized when the precision turning process is combined with additional devices such as a fast tool servo (FTS) and a slow tool servo (STS) [13,14,16,17]

Objectives

Methods

Discussion

Conclusion