Abstract
The Micromechanical Silicon Resonant Accelerometer (MSRA) is an important research direction of the high-precision Micro-accelerator. In order to alleviate the influence of the operating ambient temperature on the performance of MSRA, this paper analyzes temperature characteristics of the ring pipe, builds the mathematical model reflecting the relationship between the voltage and temperature of the ring pipe, and derives the functional relationship between the resonator's resonant frequency and the ring pipe's voltage. Following that, the ring pipe's voltage is adopted for direct temperature compensation of the resonator's resonant frequency. Test results suggest that the temperature compensation method show favorable compensation effects as to differential output of the MSRA, and can efficiently improve the performance of the MSRA.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
