Abstract
A capacitively coupled RF plasma-assisted chemical vapor deposition reactor was used to synthesize diamond. A diamond phase (sp 3C-C bonds) was detected in the deposits by Raman scattering spectroscopy. Its concentration, measured by core electron energy loss spectroscopy (CEELS), was estimated to be about 40%. The amount of hydrogen in the deposits measured by hydrogen profiling by helium ions was of the order of 1% regardless of the growth conditions. These results suggested a possibility of diamond synthesis by a capacitively coupled RF PACVD technique.
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