Abstract
A capacitively coupled RF plasma-assisted chemical vapor deposition reactor was used to synthesize diamond. A diamond phase (sp 3C-C bonds) was detected in the deposits by Raman scattering spectroscopy. Its concentration, measured by core electron energy loss spectroscopy (CEELS), was estimated to be about 40%. The amount of hydrogen in the deposits measured by hydrogen profiling by helium ions was of the order of 1% regardless of the growth conditions. These results suggested a possibility of diamond synthesis by a capacitively coupled RF PACVD technique.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
