Abstract

This paper considers the electromagnetic scattering of a plane-wave incident on a lamellar grating with finite extent, and presents a formulation based on the rigorous coupled-wave analysis (RCWA) with the help of the pseudo-periodic Fourier transform (PPFT). The RCWA is for analyzing the plane-wave scattering problem of perfectly periodic structures, and the PPFT makes us possible to apply the RCWA to the imperfectly periodic structure.

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