Abstract
With the development of Micro ElectroMechanical System(MEMS) technology in the sensor components have been shown on the achievements, with small size and can be a large number of production advantages. This study base the piezoelectric sensor components combined with the application of telemedicine, the original is made in the underwater acoustic sensor components of the MEMS process, improved into a general sound wave microphone, it will be applied to voice rehabilitation therapy. The thickness of the vibration film of the sensor is 2.5um, which can reduce the sensing frequency of the acoustic element, and the actual occupied area of the element is within 9mm2. The total sensing film is connected with several sensing films. The area of a sensing film is 1.44mm2. The sensor is applied to the voice measurement system, with a high-pass filter amplifier circuit.
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